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Repair Service/LAM/Novellus/Sabre

Clamshell Controller Overhaul;CP*GV6U12ENK-12584;Pavker;Lam Sabre

  • OEM：CP*GV6U12ENK-12584
  • HJPIN：65-21127-10

Lam Clamshell Driver

Repair Service/LAM/Novellus/Sabre

Spin Controller Overhaul;27-260590-00;Baldor;Lam Sabre

  • OEM：27-260590-00
  • HJPIN：65-21140-10

Controller

Repair Service/LAM/Novellus/Sabre

FFU Controller;CHW050-AA01-70;LAM Sabre

  • OEM：CHW050-AA01-70
  • HJPIN：65-21128-10

Controller

Repair Service/LAM/Novellus/Sabre

FI controller T-axix driver Overhaul;SGDV-1R6A11A;Sabre

  • OEM：NA
  • HJPIN：65-21133-10

Controller

Repair Service/LAM/Novellus/Sabre

Pump Controller;61-330880-00;SAC;Sabre

  • OEM：61-330880-0
  • HJPIN：65-21134-10

Controller

Repair Service/LAM/Novellus/Sabre

SAC Pump Controller;27-278337-01;Sabre

  • OEM：27-278337-01
  • HJPIN：65-21143-10

Controller

Repair Service/LAM/Novellus/Sabre

FFU probe Overhaul;Dwyer;174123-00;Sabre

  • OEM：NA
  • HJPIN：65-21801-10

FFU probe

Repair Service/LAM/Novellus/Sabre

Fan Overhaul;RH31M-4DK.2C.1R;ZIEHL-ABEGG;FFU;ECP;LAM Sabre

  • OEM：NA
  • HJPIN：65-22001-10

Fan

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